The current to the RF driven electrode was measured by an inductive pick up probe, 1 to 50 turns, from Tektronix (model P6022) placed just outside the plasma chamber. A voltage divider was placed very near to the current probe and theanbsp;...
|Title||:||XXI. International Conference on Phenomena in Ionized Gases|
|Author||:||Günther Ecker, U. Arendt, J Böseler|