The contact chain cannot be charged by the electron beam and remains bright in the SEM contrast even when the chain is ... A bias is applied to one side of the chain, and the other side is put on ground. ... Mechanical delayering to enable voltage contrast can be difficult if the ... most of the structures shown below are Characterization VehicleAr test chips on dedicated wafers (designed by PDF Solutions, anbsp;...
|Title||:||Thirty-fourth International Symposium for Testing and Failure Analysis|
|Publisher||:||ASM International - 2008-01-01|