With increasing worldwide competition, high technology product manufacturing companies have to pay great attention to lower their production costs and guarantee high quality at the same time. Advanced process control (APC) is widely used in semiconductor manufacturing to adjust machine parameters so as to achieve satisfactory product quality. The interaction between scheduling and APC motivates the second part of this dissertation. First, a single-machine makespan problem with APC constraints is proved to be NP-complete. For some special cases, an optimal solution is obtained analytically. In more general cases, the structure of optimal solutions is explored. An efficient heuristic algorithm based on these structural results is proposed and compared to an integer programming approach.Chapter. 4. Single-machine. Multiple-recipe. Predictive. Maintenance. 4.1. Introduction. Maintenance plays a very important role in modern manufacturing systems. In 1960, Barlow and Hunter  studied two types of preventive maintenanceanbsp;...
|Title||:||Semiconductor Manufacturing Inspired Integrated Scheduling Problems: Production Planning, Advanced Process Control, and Predictive Maintenance|
|Publisher||:||ProQuest - 2008|