This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.Liquids are dispensed normally from bubblers, which saturate a carrier gas stream, usually nitrogen, with the liquid dopant vapors, ... in the shape of a boron nitride wafer, which is sandwiched between two silicon wafers to be doped and then placed in a diffusion furnace. ... The annealing process helps repair the damage toanbsp;...
|Title||:||Semiconductor Industrial Hygiene Handbook|
|Author||:||David G. Baldwin, Paul C. Manz, Michael E. Williams|
|Publisher||:||William Andrew - 1995-12-31|