On the fabricated Si-CMOS circuit, optical interferomet- ric waveguides were integrated as SiCagt;2l Si-sN^/ SiOi with PECVD. The width of waveguide ... The system clock source was Tektronix  pattern generator DG2020A. The collected dataanbsp;...
|Title||:||Proceedings of IEEE Sensors ...|
|Author||:||D. Rocha, P. M. Sarro|