The SBMicro symposium is a forum dedicated to fabrication and modeling of Microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators, and MEMS. This issue contains the papers presented at the 2007 conference.R. Difrenza, P. Llinares, E. Granger, H. Brut and G. Ghibaudo, in International Conference on Microelectronics Test Structures/2001, PV 14, p. 7 (2001). 13. L. Vancaillie, F. ... ATLAS Usera#39;s Manual, SILVACO (2006). 10.1149/1.2766904 Ac Theanbsp;...
|Title||:||Microelectronics Technology and Devices--SBMICRO 2007|
|Author||:||João Antonio Martino|
|Publisher||:||The Electrochemical Society - 2007-01-01|