A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.The energy-band diagram Of a superlattice structure and the cross section of the superlattice Hall microsensor are shown in Fig. 9.7. At T = 300 K, a very high sensitivity of about 1200 V/AT is reached. Quantum-well Hall microsensors are alsoanbsp;...
|Title||:||MEMS: A Practical Guide of Design, Analysis, and Applications|
|Author||:||Jan Korvink, Oliver Paul|
|Publisher||:||Springer Science & Business Media - 2010-05-28|