This thesis presents the development of CMOS integrated micro-systems for a variety of sensors. The integration of sensors with CMOS technology enables development of miniaturized sensor systems with higher throughput, lower cost and reduced power consumption, which is critical in many medical and industrial applications. The research in this work was targeted at developing CMOS-integrated sensor systems for three different sensing modalities. First, we present wafer-level fabrication of a novel bead-based platform for multiplexed analytical detection based on electro-generated chemiluminescence (ECL) and demonstrate the use of ECL for detecting two distinct antibody proteins simultaneously. The second platform allows for heterogeneous integration of single-walled carbon nanotubes (SWNTs) based thermal sensors with CMOS interface circuitry using die-level post-CMOS processing. The SWNTs are aligned on the CMOS chip using a low temperature a low voltage dielectrophoretic Assembly process, which lays the technological foundation for integrating other nanotubes a nanowires with existing CMOS technology for the next generation of nanoscale integrated systems. The third system consists of an electrochemical sensor based on an array of microelectrodes built using native metal layers with die level post processing and integrated with an on-chip CMOS potentiostat. The performance of the microelectrode array is characterized by cyclic voltammetry experiments in a reference ferricyanide solution. All the CMOS chips were fabricated using the AMI 0.5mum CMOS technology.Such wafers are cleaned using a Piranha solution, which removes all the dust, moisture and organic stains and makes the surface hydrophilic. ... Add 30% H2O2 solution and concentrated (96%) H2SO4 in the ratio of 1:1 in a glass container. The acid should ... All the safety measures noted in the laboratory manual should be strictly followed to avoid any accidents during the piranha cleaning of wafers.
|Title||:||Integrated CMOS Microsystems for Carbon Nanotubes Based Sensing and Integrated Micro-array for Multiplexed Analyte Detection Using Electro-chemiluminescence|
|Publisher||:||ProQuest - 2008|