Industrial gases are crucial in modern industry, with almost no branch of industrial processing untouched by them. Downie reviews the preparation and applications of the main industrial gases, highlighting the chemical and technical processes used... to the perfection of the single crystal, will arise that will impair the device operation, for example by reducing carrier lifetime. These defects can be repaired by a controlled heating process or a#39;annealinga#39;. ... tube furnace can be used for annealing a whole boat of 25 or more wafers or single wafers may be annealed in ananbsp;...
|Publisher||:||Springer Science & Business Media - 1996-12-31|