Lithography is the key technology that has enabled the dynamic growth of the integrated circuit industry over the past two decades. With the continuing demand for technological development, lithography remains at the frontier of high technology. This authoritative handbook provides a comprehensive resource for process development and training, in both the microelectronics device manufacturing field and newer application areas, such as sensors, actuators and biomedical devices. The handbook is written by leading experts in the field, and may be used as a reference or text by researchers and engineers who are not expert in the area as well as a good reference for those who are.The Naval Research Laboratory in Washington, D.C., is a very active center of activities in mask fabrication and nanotechnology. ... Inspection and repair have been demonstrated. ... Metrology of the Ix mask is admittedly more difficult, but recent developments in the LMS2020 and in the Nikon 41 should come 306 / Cerrina.
|Title||:||Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography|
|Publisher||:||IET - 1997-01-01|