As we delve more deeply into the physics and chemistry of functional materials and processes, we are inexorably driven to the nanoscale. And nowhere is the development of instrumentation and associated techniques more important to scientific progress than in the area of nanoscience. The dramatic expansion of efforts to peer into nanoscale materials and processes has made it critical to capture and summarize the cutting-edge instrumentation and techniques that have become indispensable for scientific investigation in this arena. This Handbook is a key resource developed for scientists, engineers and advanced graduate students in which eminent scientists present the forefront of instrumentation and techniques for the study of structural, optical and electronic properties of semiconductor nanostructures.When working on nm-sized structures, imaging using SE or BSE may not give sufficient resolution or contrast to understand the structure being analyzed ... A diagram of an SEM system with a STEM detector is shown in Fig. ... STEM detectors can be built using scintillator/light pipe or solid state 14 L. M. Gignac and O. C. Wells.
|Title||:||Handbook of Instrumentation and Techniques for Semiconductor Nanostructure Characterization|
|Author||:||Richard Haight, Frances M. Ross, James B. Hannon|
|Publisher||:||World Scientific - 2011-09|