In order to gain detailed information on the stress state in the polysilicon structures subjected to the loads generated by the laser based testing, dynamic three-dimensional finite element simulations were preformed focusing specifically at stress concentrations generated by the device geometry. The simulations accurately predicted the location of failure recorded in the experiments although it was seen that the details of failure initiation and progression were highly dependent on geometry.leg) and stationary mirror of the reference leg. The beams reflected from ... The detector had a risetime of alt;300ps and a bandwidth of 1 .2 GHz. The output of the detector was sent to a Tektronix TDS 649C digital oscilloscope with a bandwidth of 3GHz and a maximum sample rate of 10 Gsamples/s. Details of the operation of the Michelson interferometer are presented in the next section. 2.1.4 Michelson anbsp;...
|Title||:||Failure of Microelectromechanical Systems Under Dynamic Loading: An Experimental and Numerical Investigation|
|Publisher||:||ProQuest - 2008|