This issue of ECS Transactions outlines the dielectric issues in all areas of nanosystems including the traditional areas of semiconductor processing and packaging of nanoelectronics. Various other areas, where multifunctional device integration through innovation in design, materials, and processing at the device and system level will lead to new applications of nanosystems, like electronic, optical, magnetic, mechanical, biological, chemical, energy sources, and various types of sensing devices will be included.Figure 10 shows the schematic circuit diagram of the proposed CMOS inverter. Here ... (b) (a) BOX TIN TIN Gate-1 Gate-2 Hard-mask 4T-FinFET T Si = 68 nm H fin = 96 nm 3T-PMOS 4T-NMOS G S S D D Lg 1Pm 4T 3T PMOS NMOS G G 1 G 2anbsp;...
|Title||:||Dielectrics for Nanosystems 4: Materials Science, Processing, Reliability, and Manufacturing|
|Publisher||:||The Electrochemical Society - 2010-04|