Atomic Layer Deposition can enable precise deposition of ultra-thin, highly conformal coatings over complex 3D topography, with controlled composition and properties for a wide range of applications.Film thickness was determined with X-ray reflectometry (XRR) with a Bruker D8 Discover diffractometer with CuKIp ... a Thermo VG Scientific ESCALAB 220i-XL with a Al KIp X-ray source. manual valve needle valve pneumatic valve H 2 O Ar 2 anbsp;...
|Title||:||Atomic Layer Deposition Applications 5|
|Author||:||S. de Gendt|
|Publisher||:||The Electrochemical Society - 2009-09|