This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas50 V tv 0 \(-2.1 kV) Figure 7: Schematical view of the reference voltage Vox, during the measument of ions with initial ... The current I(t) and voltage V(t) at the powered electrode are measured with a Tektronix P6022 current (X) and P5100anbsp;...
|Title||:||Advanced Technologies Based on Wave and Beam Generated Plasmas|
|Author||:||H. Schlüter, A. Shivarova|
|Publisher||:||Springer Science & Business Media - 2013-06-29|